Delton brings 30 years experience in high purity thin film processing, semiconductor fabrication support, and process gas, slurry, and chemical delivery.
Delton began his career in business development at MKS Instruments, eventually becoming President of the Advanced Product Integration Division. He later joined the Mega Fluids (Chempure) subsidiary of Celerity (Kinetics) as the VP of Marketing, and eventually General Manager. Delton also served as the CEO of Zeihm Imaging and recently was involved in business acquisitions and integration for M+W and Total Facilities Solutions.
Koh Murai, P.E.
Vice President of Engineering
Koh Murai, P.E., brings 35 years of engineering experience to Mega Fluid Systems. He has worked with slurry handling equipment, new product development, design, and manufacturing within the Semiconductor and industrial sectors.
Prior to joining Mega Fluid Systems, Koh Murai spent 8 years as the NPI Engineering Manager for Ichor Systems. Previously, Koh was the Engineering Manager for a contract aerospace design and build firm, preceded by 10 years in the same capacity with The Clarkson Company designing and producing a wide range of slurry control valves. Koh Murai has held design, project, process, and production engineering positions with polymer extrusion and heavy chemical manufacturing firms, in addition to a systems safety engineering position contracted to NASA.
Koh Murai has received his B.S.E in Chemical Engineering and is a registered Professional Engineer (Chemical) in Texas and Nevada. He is a senior member of the American Institute of Chemical Engineers and the American Institute of Aeronautics and Astronautics.
Dr. Karey Holland
Vice President of Process Technology
Karey Holland brings over 30 years of CMP experience to Mega Fluid Systems, having been involved in CMP development since its first development for IC manufacturing at IBM in the 1980s. After leaving IBM, Dr. Holland served as CTO of several CMP materials and equipment suppliers to the electronics industry such as SpeedFam-IPEC, NexPlanar, RimPad, and various Process Technologist titles at TWI (Thomas West Inc.), BOC-Edwards, and Silco.
Dr. Holland holds a Ph.D. in analytical chemistry from The Pennsylvania State University, an M.S. in analytical chemistry from Purdue University, and a B.A. in chemistry from Albion College.
Director, Greater China and Southeast Asia
Harvey Pinder brings over 20 years of CMP, wet etch, metrology, epitaxy, and CVD experience in both equipment and consumables to Mega Fluid Systems. Harvey began his semiconductor career in 1993 as an Equipment Engineer and has since held varying positions including Field Service, Process Development, R&D, New Product Development, Project Management, Technical Account Management and Sales, Customer Service and Field Service Management, Regional Sales/Service Management and Consulting for Process and New Product Development, supporting primarily the Asian region for more than 19 years including living in Taiwan, Singapore, Philippines and China.
Regional Sales Vice President and General Manager
Michael Yang brings over 15 years’ experience in the semiconductor and solar industry. Michael began his semiconductor career as a Service/Application Engineer for IPEC and AMAT, and later in sales and process application with Rodel/RohmHaas/Dow Chemical. While there, he held positions in customer service, sales for pads & slurry, and UMC & D-RAM account management. He also established the RohmHaas China Shanghai office to strengthen the China territory. Michael’s solar experience includes 6 years at NewE Material in management of sales and R&D.
Vice President of Operations
Mike Hede brings over 15 years of engineering and management experience to Mega Fluid Systems, having experience in fast-paced, complex and highly configurable product development from concept to final test for the high-tech industry. Prior to joining Mega, Mike has held several positions such as Director of Engineering, Director of Sales Operations & New Business Development, and Quality Engineer at Ultra Clean Technology in Hillsboro, Oregon. He is a Lieutenant Colonel in the United States Marine Corps with over 25 years of military leadership experience, professional development, and advanced training.
Michael Senseman brings 6 years of experience in the tech-manufacturing industry to Mega Fluid Systems, having experience in cost accounting, financial management and advanced accounting systems. Prior to joining Mega, Michael held the position of Controller at Via Optronics LLC, an optical bonding manufacturing company in Hillsboro, Oregon.
Michael earned a B.S. in Accounting from the University of Oregon’s Lundquist College of Business, and an M.B.A. in Finance from Marylhurst University. He also comes from a competitive sports background as a former semi-professional ice hockey player in the Western Hockey League.
Rob Eiseler conveys over 25 years of product design, product engineering, manufacturing engineering and New Product Introduction (NPI) experience to Mega Fluid Systems as Engineering Manager.
Rob has worked in the process chemical delivery industry for 9 years. He has extensive experience in the design of industrial equipment for the slurry and process chemicals used in semiconductor manufacturing, including configuration management, document control, Design for Manufacturing (DFM) and NPI. Rob’s experience also includes prototype development for LCD and TFT displays, commercial and defense telecommunications product engineering, electronic assembly, and engineering laboratory management.
Rob holds a B.S. in Mechanical Engineering from Northern Arizona University.
Chuck brings 27 years’ experience in the Semiconductor industry started in 1990 when he joined SCP Global Technologies as an FSE, supporting wet cleaning & etching equipment. His roles at SCP included all phases of Customer Support, Installation Management, and various Project Management. Focus for over 10 years included supporting 3 of the top tier-A Semiconductor Customers globally.
While at Akrion Systems, Chuck became the Customer Service Manager supporting the Asia region out of Taiwan. Later, with Veeco Instruments, his roles as Installation Manager had him placing over 300 MOCVD production systems both in South Korea and China, and later serving for 4 years in Santa Clara, California, as their NA and EMEA Customer Service Manager.
Chuck joined Mega Fluid Systems in August 2016 with a focus on all aspects of Customer engagements and satisfaction. His responsibilities include developing an effective service product offering, establishing an escalation protocol, service KPI and KBP development, and Field Service Technician certifications capturing all phases from Manufacturing, Cal/Test, Installations, warranty support and Project Preparation and Management.