Leading Foundry Selects Mega Fluid Systems for Customized CMP Solutions

Made-to-Order Blending and Delivery System Shipped and Installed

Tualatin, OR–(Apr 23, 2014) – Mega Fluid Systems Inc, a global supplier of chemical and slurry delivery equipment to the semiconductor, LED, pharmaceutical, specialty chemicals and solar/PV industries, today announced completion of a major tool shipment and installation at a leading U.S.-based foundry. Under the terms of the agreement, Mega designed a slurry/chemical blending and delivery system to be used specifically for supplying dynamic chemistries for CMP polishing applications. Mega’s system was chosen because it can be tailored to handle the customer’s specific chemistries without affecting their properties, leading to improved process results and lower cost of ownership.

“This customer’s specific process is relatively complex, which called for a highly customized solution,” said Delton Hyatt, president of Mega Fluid Systems. “We have supplied this customer for over 15 years, which shows us that our tools are providing the reliability and cutting edge technology advantages that are so important in this highly competitive industry. The customer’s understanding of our technology and familiarity with our systems certainly contributed to this order.”

“The customer recognized that not only are they getting best-in-class systems, they are minimizing the risk inherent with a new process by working with the industry leader in slurry distribution systems,” stated Mike Mueller, vice president of sales at SemiTorr, who managed the customer relationship and successful implementation of the tool on behalf of Mega.

Mega Fluid Systems is globally recognized for its design and manufacture of slurry and chemical delivery systems. The design of the shipped tool was based on a Mega system currently in use by the customer’s parent company. Using that as a starting point, Mega aligned the processes then it customized certain components of the application in order to meet specific operating requirements. The tool employs an independent two-station process designed to blend and dispense chemistries to a single global loop. The company’s technology supports low cost of ownership with low equipment maintenance, a long lifespan and reduced chemical consumption.

About Mega Fluid Systems

Founded in 1990, Mega Fluid Systems has extensive experience offering world-class chemical and slurry delivery equipment to the global semiconductor, LED, pharmaceutical, specialty chemicals, and solar/PV industries. With a global installed base in Asia, Europe, and North America, our state-of-the-art systems continue to be chosen by leading customers worldwide to deliver the most difficult chemistries and sensitive slurries to their CMP tools and processes.

Mega Fluid Systems offers world-class engineering, manufacturing, and testing capabilities. Mega’s partners benefit from high-level customer service and support from our program management, sales, engineering, service, and executive management teams. Mega is headquartered in Tualatin, Oregon, with sales and engineering offices around the globe. www.megafluidsystems.com

About SemiTorr Inc.

Founded in 1988, SemiTorr is a sales and distribution company serving high purity markets: semiconductor, pharmaceutical, biotech, Solar/PV, LED, data storage and related industries. SemiTorr has offices in OR, CA, AZ, UT, NY & PA. www.semitorrinc.com