Tualatin, Oregon – (May 9, 2017) – Leveraging nearly 30 years of expertise in slurry management for the semiconductor, LED, solar and related markets, Mega Fluid Systems Inc. today introduced the Essex line of slurry and chemical blend and distribution systems. Essex offers the first high-quality, cost-effective system to meet the slurry and chemistry delivery needs of low-volume, legacy-node and specialty technologies. Originally developed for advanced CMP processes, Mega Fluid Systems has reconfigured its proven slurry blend, dilution and dispense capabilities for processes requiring minimal slurry changes. In doing so, the company has set a new standard in slurry delivery for customers focused on the internet of things (IoT) and other cost-centric applications.
According to market research firm IDC, global IoT spending will experience a compound annual growth rate of 15.6% over the 2015-2020 forecast period, reaching $1.29 trillion in 2020. However, according to market research expert Jim Walker, while the IoT market will drive high volumes, it will involve low-value silicon in most applications, which adds little in terms of semiconductor revenue. Cost-effective manufacturing solutions, therefore, will impact the bottom line for not only chipmakers, but also manufacturers of MEMS, sensors, LED and power semiconductors.
“Essex targets the needs of a different type of customer than those who buy our custom slurry blend and delivery systems,” said Dr. Karey Holland, vice president of process technology for Mega Fluid Systems. “We set out to design a benchmark platform that didn’t skimp on quality, but rather carried through our state-of-the-art capabilities in a streamlined format to deliver a cost-effective system that optimizes device yield and throughput, so our customers can compete in the growing IoT market. Based on initial customer response, we’ve achieved that goal with Essex.”
The Essex line is an economical family of tools that meets customer requirements for slurries and planar chemistries at nine or fewer polish stations, and can precisely blend two components, with the option for precise chemical additives such as H2O2. The mixing tank was designed to ensure optimal slurry batch life, thereby reducing waste. Additional features include:
- ≤ 3 L/min makeup rates
- 100L blend tank in 60”x30” cabinet
- 250L dispense tank on drip pan outside cabinet
- Raw slurry supply from bulk drum if ≤ 5 meters from Essex tool
- Automatic raw drum swapping optional
Mega Fluid Systems is now accepting orders for Essex systems.
About Mega Fluid Systems Inc.
Founded in 1990, Mega Fluid Systems Inc. has extensive experience offering world-class chemical and slurry delivery equipment to the global semiconductor, LED, pharmaceutical, specialty chemicals and solar/PV industries. With a global installed base in Asia, Europe and North America, our state-of-the-art systems continue to be chosen by leading customers worldwide to deliver the most difficult chemistries and sensitive slurries to their CMP tools and processes. Mega Fluid Systems offers world-class engineering, manufacturing and testing capabilities. Mega’s partners benefit from high-level customer service and support from our program management, sales, engineering, service and executive management teams. Mega is headquartered in Tualatin, Oregon, with sales and engineering offices around the globe. www.megafluidsystems.com.
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