MegaPure™ 100SS

The MegaFlow 100SS Chemical Distribution System with pulsation dampener provides single pass filtration at 0.05μ for solvents with a space efficient footprint. It is generally configured for one or two 55 gallon feed drums. Advanced microprocessor PLC-based controls are isolated in a separate nitrogen purged compartment. PLC network communication enhances the system’s user-friendly operator interface panel.

  • Excess flow indication and shutdown
  • Photoelectric leak detection and alarm
  • Manual N2 pump and filter purging
  • Recirculating DI spray gun
  • Cabinet door interlocks
  • Teflon™ pump with pulsation dampening
  • Manual valve isolation of inlet and outlet lines and pump
  • Non-intrusive drum empty detection
  • Cartridge filter (10″)
  • Class 1, Division II approved


Mega SD100™

The Mega SD 100 Series supplies raw slurry to the SBD system from one of two totes/drums. As raw slurry is depleted from one tote/drum, the Mega SD 100 Series replenishes the supply from the other t...

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MegaPure™ 500SF

The MegaPure 500SF Chemical Distribution System provides exceptional submicron particle performance. Developed to meet the needs of fabs running below 0.5mm geometries, the MegaPure 500SF offers hig...

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