MegaPure™ 4200SF

The MegaPure 25 Chemical Distribution System provides single pass filtration as low as 0.05μ. It is PLC controlled and generally configured to be fed from one or two local stand-alone feed drums. It is designed for localized dispensing for medium purity applications or as a feed station for larger blending units. (The drum(s), pump(s), and filter(s) are all located in the same cabinet to minimize the use of subfab floor space.)

  • Photoelectric leak detection and alarm
  • Cabinet door interlocks
  • Manual valve isolation of TeflonTM inlet and outlet lines and pump
  • Cartridge filter (10″)
  • Separate NEMA rated fiberglass controls compartment
  • Integrated controls with comprehensive status and safety sensing



  • Dual drum with auto-changeover
  • Redundant pump
  • FRPP cabinet (S2-92 and FM4910 reviewed)
  • Custom configuration and integration
  • Redundant filters
  • Specific chemical resistant components
  • Drum recirculation with chemical polishing

Mega SD50™

The Mega SD50 Series Slurry Distribution System feeds raw slurry to a Mega Slurry Blend and Distribution (SBD) system. The Distribution system is configured to continuously circulate raw slurry from...

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MegaPure™ 100SS

The MegaFlow 100SS Chemical Distribution System with pulsation dampener provides single pass filtration at 0.05μ for solvents with a space efficient footprint. It is generally configured for one or...

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