MegaPure™ 50

The MegaPure 50 Chemical Distribution System provides single pass filtration at 0.05μ. It is PCL controlled and generally configured to be fed from one or two local stand-alone feed drums. It is designed for localized dispensing for medium purity applications or as a feed station for larger blending units.

  • Photoelectric leak detection and alarm
  • Cabinet door interlocks
  • Manual valve isolation of Teflon™ inlet and outlet lines and pump
  • Cartridge filter (10″)
  • Separate NEMA rated fiberglass controls compartment
  • Integrated controls with comprehensive status and safety sensing


  • Dual drum with auto-changeover
  • High capacity (HC)
  • Redundant pump
  • FRPP cabinet (S2-92 and FM4910 reviewed)
  • Custom configuration and integration
  • Connectivity to SCADA (based on applications)

MegaPure™ 100SS

The MegaFlow 100SS Chemical Distribution System with pulsation dampener provides single pass filtration at 0.05μ for solvents with a space efficient footprint. It is generally configured for one or...

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MegaPure™ 500SF

The MegaPure 500SF Chemical Distribution System provides exceptional submicron particle performance. Developed to meet the needs of fabs running below 0.5mm geometries, the MegaPure 500SF offers hig...

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