MegaPure™ 500SF

The MegaPure 500SF Chemical Distribution System provides exceptional submicron particle performance. Developed to meet the needs of fabs running below 0.5mm geometries, the MegaPure 500SF offers high-purity 0.05μm polishing filtration and a particle performance for most chemicals of less than 10 particles per ml at 0.2μm. Stabilized Filtration of the day tank eliminates filter shocking. Built-in redundancy and the day tank are included for high volume distribution to multiple use-points.

  • Excess flow indication and shutdown
  • Photoelectric leak detection and alarm
  • Manual DI/N2 pump and filter purging
  • Cabinet door interlocks
  • Recirculating DI spray guns
  • Separate drum and day tank filtration circuits
  • Cartridge filter (10″)
  • Encapsulated or cartridge dispense filter
  • Sample ports
  • Dual drum with auto-changeover

 

Options

  • High capacity (HC)
  • Parallel drum filter (Standard on HC)
  • Parallel day tank filter (Standard on HC)
  • Fab-wide recirculation
  • Aspirated drain (for non-solvent applications)
  • Drum/day tank cabinet
  • FRPP cabinet (S2-93 and FM4910 reviewed)
  • CE Mark 220 V, 50Hz
  • Stainless steel (304) station for solvent applications


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